Brooks Instrument will unveil its new XacTorr CMX0 capacitance manometer, as well as the new EtherCAT capabilities of its GF40/80 mass flow controller at Intersolar North America, July 10-12 in San Francisco. Brooks will showcase these and other mass flow, pressure and vacuum products for the solar and semiconductor industries at Booth 5648.
The Brooks XacTorr CMX family of capacitance manometers provides solar and semiconductor manufacturers with highly stable and repeatable measurements for pressure sensitive processes. The product offers full-scale ranges from 1,000 Torr to 100 mTorr, as well as 0.15% of reading accuracy. With its patented Mark IV sensor the Brooks XacTorr lasts up to three times as long in aggressive processes compared to other capacitance manometers. The rapid recovery feature allows the sensor to recover from large changes in pressure faster than other vacuum gauges on the market, significantly decreasing downtime.
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